Yttrium Oxide Thermal Spraying Coating Powder
Yttrium oxide is a highly stable compound with a high melting point and is very inert chemically. Yttrium oxide is also known to possess excellent plasma-tech and erosion resistance, particularly in plasma containing halogen species.
Yttria caoting used on chamber walls and tooling for semiconductor manucturing, which are typically applied by atmospheric plasma spray, must be of high purity, high particle size control.
Manufacture Agglomerated or agglomerated and sintered
Apparent Density 1.4 to 1.1g/cm3
Service Temperature ≤2000°C（3630°F），lower in reducing enviroment
Melting point 2425°C（4397°F）
Purpose Plasma etching/thermal spraying/Ceramic coating
Typical Uses and Applications
Plasma etch and erosion resistance on surfaces exposed to reactive plasma gases in semiconductor manufacturing systems, such as vacuum chamber walls and other components n Electrostatic chucks n Linings for graphite molds